Plasma distribution in a triple-cathode vacuum arc deposition apparatus

R. Ben-Ami*, V. N. Zhitomirsky, R. L. Boxman, S. Goldsmith

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


A study was conducted, focusing on the distribution of plasma beams produced by Ti, Nb and Zr cathodes in a triple-cathode vacuum arc deposition system consisting of a triple-cathode plasma gun, straight plasma duct, sample chamber, vacuum system and computerized control system. The saturated ion current distribution in the plasma was measured by a 13-segment multi-probe. The measurements were carried out for each cathode operated separately in vacuum and in a background nitrogen gas at pressures of 0.4-1.33 Pa. Finally, the ion currents collected by the individual elements of the multi-probe were fitted to a two-dimensional Gaussian function.

Original languageEnglish
Pages (from-to)355-362
Number of pages8
JournalPlasma Sources Science and Technology
Issue number3
StatePublished - Aug 1999


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