TY - JOUR
T1 - Plasma distribution in a triple-cathode vacuum arc deposition apparatus
AU - Ben-Ami, R.
AU - Zhitomirsky, V. N.
AU - Boxman, R. L.
AU - Goldsmith, S.
PY - 1999/8
Y1 - 1999/8
N2 - A study was conducted, focusing on the distribution of plasma beams produced by Ti, Nb and Zr cathodes in a triple-cathode vacuum arc deposition system consisting of a triple-cathode plasma gun, straight plasma duct, sample chamber, vacuum system and computerized control system. The saturated ion current distribution in the plasma was measured by a 13-segment multi-probe. The measurements were carried out for each cathode operated separately in vacuum and in a background nitrogen gas at pressures of 0.4-1.33 Pa. Finally, the ion currents collected by the individual elements of the multi-probe were fitted to a two-dimensional Gaussian function.
AB - A study was conducted, focusing on the distribution of plasma beams produced by Ti, Nb and Zr cathodes in a triple-cathode vacuum arc deposition system consisting of a triple-cathode plasma gun, straight plasma duct, sample chamber, vacuum system and computerized control system. The saturated ion current distribution in the plasma was measured by a 13-segment multi-probe. The measurements were carried out for each cathode operated separately in vacuum and in a background nitrogen gas at pressures of 0.4-1.33 Pa. Finally, the ion currents collected by the individual elements of the multi-probe were fitted to a two-dimensional Gaussian function.
UR - http://www.scopus.com/inward/record.url?scp=0032635315&partnerID=8YFLogxK
U2 - 10.1088/0963-0252/8/3/303
DO - 10.1088/0963-0252/8/3/303
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AN - SCOPUS:0032635315
SN - 0963-0252
VL - 8
SP - 355
EP - 362
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 3
ER -