Keyphrases
Ultrasensitive
100%
Aluminum Substrate
100%
Aluminum Nitride Film
100%
Aluminum Nitride Thin Film
100%
Mechanical Pressure
80%
Piezoelectric Response
40%
Deposition Temperature
20%
Sound Wave
20%
Medical Diagnosis
20%
Technological Fields
20%
Thermally Induced
20%
Reactive Sputtering
20%
Nozzle
20%
Pressure Sensor
20%
Crystal Orientation
20%
Residual Stress
20%
Ultrasmall
20%
Narrow Diameter
20%
Average Stress
20%
Piezoelectric Actuator
20%
Atomic Arrangement
20%
Induced Pressure
20%
Substrate Interface
20%
Al Substrate
20%
Gas Leakage
20%
Medical Gas
20%
Engineering
Thin Films
100%
Nitride
100%
Piezoelectric
100%
Aluminum Substrate
100%
Reactive Sputtering
14%
Pressure Sensor
14%
Crystallographic Orientation
14%
Substrate Interface
14%
Residual Stress
14%
Piezoelectric Actuator
14%
Film Plane
14%
Deposition Temperature
14%
Atomic Arrangement
14%
Al Substrate
14%
Gas Leakage
14%
Material Science
Aluminum
100%
Aluminum Nitride
100%
Thin Films
100%
Piezoelectricity
100%
Film
85%
Actuator
14%
Residual Stress
14%
Chemical Engineering
Aluminum Nitride
100%
Reactive Sputtering
14%