Abstract
A novel photothermal in situ surface pretreatment that reduces the interface charge between p-type CdTe substrates and CdTe epilayers grown by metalorganic chemical vapor deposition is reported. Prior to the actual growth of the epilayers, the substrates are held at 450°C in hydrogen atmosphere and simultaneously exposed to ultraviolet radiation. The interface charge is determined by the modified builtin potential derived from capacitance-voltage characteristics of Schottky contacts formed on the epilayers. The interface charge density is reduced from a typical value of ∼1×1012 cm-2 to a practically negligible value.
| Original language | English |
|---|---|
| Pages (from-to) | 995-997 |
| Number of pages | 3 |
| Journal | Journal of Applied Physics |
| Volume | 73 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1993 |
| Externally published | Yes |
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