Patterning of high Tc superconducting thin films by copper-vapour laser

Z. Barkay, G. Deutscher, Y. Kagan, Y. Shapira

Research output: Contribution to journalArticlepeer-review

Abstract

The projection microscope, based on a copper-vapour laser (CVL), is a unique system which combines the capabilities of a high magnification optical microscope and the performance of a high quality laser. The system performance with respect to high Tc superconducting (HTSC) device technology was studied using a scanning electron microscope. CVL patterning of YBaCuO films was demonstrated down to less than 2 μm. The thin films could be partially etched in depth just by controlling the laser pulse power density. In addition in HTSC device applications it could remove layers from thin films up to a complete etching.

Original languageEnglish
Pages (from-to)35-38
Number of pages4
JournalJournal of Materials Science: Materials in Electronics
Volume9
Issue number1
DOIs
StatePublished - 1998

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