Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser doppler vibrometery

Yoav Linzon, Said Mahajna, Bojan Ilic, Slava Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.

Original languageEnglish
Title of host publicationOptical Sensors, Sensors 2013
StatePublished - 2013
EventOptical Sensors, Sensors 2013 - Rio Grande, Puerto Rico
Duration: 14 Jul 201317 Jul 2013

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Sensors, Sensors 2013
Country/TerritoryPuerto Rico
CityRio Grande
Period14/07/1317/07/13

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