Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.
|Title of host publication||Optical Sensors, Sensors 2013|
|State||Published - 2013|
|Event||Optical Sensors, Sensors 2013 - Rio Grande, Puerto Rico|
Duration: 14 Jul 2013 → 17 Jul 2013
|Name||Optics InfoBase Conference Papers|
|Conference||Optical Sensors, Sensors 2013|
|Period||14/07/13 → 17/07/13|