TY - GEN
T1 - Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser doppler vibrometery
AU - Linzon, Yoav
AU - Mahajna, Said
AU - Ilic, Bojan
AU - Krylov, Slava
PY - 2013
Y1 - 2013
N2 - Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.
AB - Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.
UR - http://www.scopus.com/inward/record.url?scp=84898060867&partnerID=8YFLogxK
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AN - SCOPUS:84898060867
SN - 9781557529817
T3 - Optics InfoBase Conference Papers
BT - Optical Sensors, Sensors 2013
T2 - Optical Sensors, Sensors 2013
Y2 - 14 July 2013 through 17 July 2013
ER -