Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser doppler vibrometery

Yoav Linzon; Said Mahajna; Bojan Ilic; Slava Krylov

Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser doppler vibrometery

Yoav Linzon, Said Mahajna, Bojan Ilic, Slava Krylov

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.

Original language	English
Title of host publication	Optical Sensors, Sensors 2013
State	Published - 2013
Event	Optical Sensors, Sensors 2013 - Rio Grande, Puerto Rico Duration: 14 Jul 2013 → 17 Jul 2013

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Optical Sensors, Sensors 2013
Country/Territory	Puerto Rico
City	Rio Grande
Period	14/07/13 → 17/07/13

Cite this

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title = "Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser doppler vibrometery",

abstract = "Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.",

author = "Yoav Linzon and Said Mahajna and Bojan Ilic and Slava Krylov",

year = "2013",

language = "אנגלית",

isbn = "9781557529817",

series = "Optics InfoBase Conference Papers",

booktitle = "Optical Sensors, Sensors 2013",

note = "null ; Conference date: 14-07-2013 Through 17-07-2013",

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AU - Linzon, Yoav

AU - Mahajna, Said

AU - Ilic, Bojan

AU - Krylov, Slava

PY - 2013

Y1 - 2013

N2 - Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.

AB - Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.

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AN - SCOPUS:84898060867

SN - 9781557529817

T3 - Optics InfoBase Conference Papers

BT - Optical Sensors, Sensors 2013

Y2 - 14 July 2013 through 17 July 2013

ER -

Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser doppler vibrometery

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