Parametric excitation of flexural vibrations of micro beams by fringing electrostatic fields

Keyphrases

• Electrostatic Field 100%
• Electrostatic Force 100%
• Fringing Field 100%
• Microbeam 100%
• Parametric Excitation 100%
• Flexural Vibration 100%
• Electric Field (E-field) 50%
• Actuator 50%
• Reduced Order Model 50%
• Large Amplitude 50%
• Three-dimensional (3D) 50%
• Numerical Solution 50%
• Effective Stiffness 50%
• Wafer 50%
• Deep Reactive Ion Etching 50%
• Pull-in Instability 50%
• Out-of-plane Vibration 50%
• Deflection 50%
• Deformed State 50%
• Silicon-on-insulator 50%
• Linear Mode 50%
• Insulator Substrate 50%
• Galerkin Decomposition 50%
• Efficient Excitation 50%
• Experimental Feasibility 50%
• Varying Voltage 50%
• Nonlinear System of Differential Equations 50%
• Vibrational Amplitudes 50%
• Ambient Air Conditions 50%
• Laser Doppler Vibrometry 50%
• Electrostatic Stiffness 50%

Engineering

• Electrostatics 100%
• Electrostatic Field 100%
• Parametric Excitation 100%
• Flexural Vibration 100%
• Electric Field 33%
• Reduced Order Model 33%
• Experimental Result 33%
• Numerical Solution 33%
• Applied Voltage 33%
• Basis Function 33%
• Deep Reactive Ion Etching 33%
• Feasibility Study 33%
• Silicon on Insulator 33%
• Ambient Air 33%
• Air Condition 33%