Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors

E. Socher; O. Degani; Y. Nemirovsky

doi:10.1016/S0924-4247(98)00179-4

Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors

E. Socher, O. Degani, Y. Nemirovsky^*

^*Corresponding author for this work

Technion-Israel Institute of Technology

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

Abstract

The paper presents a new optimization methodology for integrated thermoelectric sensors. A steady-state and time-dependent analytical model of the signal and noise of the microsystem is presented and the figures of merit of the microsystem are defined. A qualitative and quantitative study of the system performance is conducted with respect to ambient pressure, the number of thermocouples and conducting lead width. A design chart for the sensors' optimization is presented, through which the performance envelope is defined with respect to the NEP (noise equivalent power) and the time constant of the microsystem.

Original language	English
Pages (from-to)	107-115
Number of pages	9
Journal	Sensors and Actuators, A: Physical
Volume	71
Issue number	1-2
DOIs	https://doi.org/10.1016/S0924-4247(98)00179-4
State	Published - 1 Nov 1998
Externally published	Yes

Keywords

Design optimization
Microsystems
Sensor modeling
Thermopiles

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10.1016/S0924-4247(98)00179-4

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N2 - The paper presents a new optimization methodology for integrated thermoelectric sensors. A steady-state and time-dependent analytical model of the signal and noise of the microsystem is presented and the figures of merit of the microsystem are defined. A qualitative and quantitative study of the system performance is conducted with respect to ambient pressure, the number of thermocouples and conducting lead width. A design chart for the sensors' optimization is presented, through which the performance envelope is defined with respect to the NEP (noise equivalent power) and the time constant of the microsystem.

AB - The paper presents a new optimization methodology for integrated thermoelectric sensors. A steady-state and time-dependent analytical model of the signal and noise of the microsystem is presented and the figures of merit of the microsystem are defined. A qualitative and quantitative study of the system performance is conducted with respect to ambient pressure, the number of thermocouples and conducting lead width. A design chart for the sensors' optimization is presented, through which the performance envelope is defined with respect to the NEP (noise equivalent power) and the time constant of the microsystem.

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KW - Microsystems

KW - Sensor modeling

KW - Thermopiles

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Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors

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Keywords

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