Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors

E. Socher, O. Degani, Y. Nemirovsky

Research output: Contribution to journalArticlepeer-review

Abstract

The paper presents a new optimization methodology for integrated thermoelectric sensors. A steady-state and time-dependent analytical model of the signal and noise of the microsystem is presented and the figures of merit of the microsystem are defined. A qualitative and quantitative study of the system performance is conducted with respect to ambient pressure, the number of thermocouples and conducting lead width. A design chart for the sensors' optimization is presented, through which the performance envelope is defined with respect to the NEP (noise equivalent power) and the time constant of the microsystem.

Original languageEnglish
Pages (from-to)107-115
Number of pages9
JournalSensors and Actuators, A: Physical
Volume71
Issue number1-2
DOIs
StatePublished - 1 Nov 1998
Externally publishedYes

Keywords

  • Design optimization
  • Microsystems
  • Sensor modeling
  • Thermopiles

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