The paper presents a new optimization methodology for integrated thermoelectric sensors. A steady-state and time-dependent analytical model of the signal and noise of the microsystem is presented and the figures of merit of the microsystem are defined. A qualitative and quantitative study of the system performance is conducted with respect to ambient pressure, the number of thermocouples and conducting lead width. A design chart for the sensors' optimization is presented, through which the performance envelope is defined with respect to the NEP (noise equivalent power) and the time constant of the microsystem.
- Design optimization
- Sensor modeling