@article{60ba276784914cd7872f4c6428b5c6fa,
title = "Optimal design and noise consideration of micromachined vibrating rate gyroscope with modulated integrative differential optical sensing",
abstract = "A novel design of a micromachined vibrating rate gyroscope is presented. The rate gyroscope consists of a suspended proof mass which is attached by indium bumps to a CMOS chip. The proof mass is excited to vibration by electrostatic force. The displacements due to rate are sensed optically, using CMOS-integrated photodiodes and analog electronics. System considerations, including the mechanical behavior, optical sensing, electronics, and noise sources of the rate gyroscope, are discussed. An expression for the noise equivalent rate (NER) of the system is obtained in order to derive an optimal design approach for the rate gyroscope. Optimal design and simulations of a case study of a rate gyroscope are presented. The device shows the ability of sensing 1 deg/h even at moderate quality factors of the order of 5000 and low-excitation voltages of 2.25 V.",
keywords = "Gyroscope, MEMOS, MIDOS, Noise, Optical, Rate",
author = "Ofir Degani and Seter, {Dan J.} and Eran Socher and Shmuel Kaldor and Yael Nemirovsky",
note = "Funding Information: Manuscript received January 28, 1998; revised April 26, 1998. This work was supported by the Israeli Ministry of Science. Subject Editor, R. T. Howe. O. Degani, E. Socher, and Y. Nemirovsky are with the Kidron Microelectronics Research Center, Department of Electrical Engineering, Tech-nion—Israel Institute of Technology, Haifa 32000, Israel. D. J. Seter and S. Kaldor are with the MEMOS Laboratory, Armament Development Authority, Haifa 31021, Israel. Publisher Item Identifier S 1057-7157(98)06660-8.",
year = "1998",
month = sep,
doi = "10.1109/84.709652",
language = "אנגלית",
volume = "7",
pages = "329--338",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "3",
}