Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

Lior Medina; Rivka Gilat; Bojan R. Ilic; Slava Krylov

doi:10.1109/MEMSYS.2017.7863525

Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

Lior Medina^*, Rivka Gilat, Bojan R. Ilic, Slava Krylov

^*Corresponding author for this work

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	785-788
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863525
State	Published - 23 Feb 2017
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

Keywords

Bistability
Curved micromechanical beam
Electrostatic actuation
MEMS/NEMS
Self-excitation

Access to Document

10.1109/MEMSYS.2017.7863525

Cite this

Medina, L., Gilat, R., Ilic, B. R., & Krylov, S. (2017). Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 785-788). Article 7863525 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863525

Medina, Lior ; Gilat, Rivka ; Ilic, Bojan R. et al. / Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 785-788 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{7a164df8851d4fb081066c3ce38752ed,

title = "Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load",

abstract = "We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.",

keywords = "Bistability, Curved micromechanical beam, Electrostatic actuation, MEMS/NEMS, Self-excitation",

author = "Lior Medina and Rivka Gilat and Ilic, {Bojan R.} and Slava Krylov",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

year = "2017",

month = feb,

day = "23",

doi = "10.1109/MEMSYS.2017.7863525",

language = "אנגלית",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "785--788",

booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",

address = "ארצות הברית",

}

Medina, L, Gilat, R, Ilic, BR & Krylov, S 2017, Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863525, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 785-788, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863525

Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load. / Medina, Lior; Gilat, Rivka; Ilic, Bojan R. et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 785-788 7863525 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

AU - Medina, Lior

AU - Gilat, Rivka

AU - Ilic, Bojan R.

AU - Krylov, Slava

PY - 2017/2/23

Y1 - 2017/2/23

N2 - We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.

AB - We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.

KW - Bistability

KW - Curved micromechanical beam

KW - Electrostatic actuation

KW - MEMS/NEMS

KW - Self-excitation

UR - http://www.scopus.com/inward/record.url?scp=85015729679&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2017.7863525

DO - 10.1109/MEMSYS.2017.7863525

M3 - ???researchoutput.researchoutputtypes.contributiontobookanthology.conference???

AN - SCOPUS:85015729679

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 785

EP - 788

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Medina L, Gilat R, Ilic BR, Krylov S. Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 785-788. 7863525. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863525

Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

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