TY - GEN

T1 - Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

AU - Medina, Lior

AU - Gilat, Rivka

AU - Ilic, Bojan R.

AU - Krylov, Slava

N1 - Publisher Copyright:
© 2017 IEEE.

PY - 2017/2/23

Y1 - 2017/2/23

N2 - We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.

AB - We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.

KW - Bistability

KW - Curved micromechanical beam

KW - Electrostatic actuation

KW - MEMS/NEMS

KW - Self-excitation

UR - http://www.scopus.com/inward/record.url?scp=85015729679&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2017.7863525

DO - 10.1109/MEMSYS.2017.7863525

M3 - ???researchoutput.researchoutputtypes.contributiontobookanthology.conference???

AN - SCOPUS:85015729679

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 785

EP - 788

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -