Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments

Yoram Shapira; J. Bregman; Z. Calahorra

doi:10.1063/1.95847

Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments

Yoram Shapira^*, J. Bregman, Z. Calahorra

^*Corresponding author for this work

Department of Electrical Engineering - Physical Eng.

Tel Aviv University

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.

Original language	English
Pages (from-to)	48-50
Number of pages	3
Journal	Applied Physics Letters
Volume	46
Issue number	1
DOIs	https://doi.org/10.1063/1.95847
State	Published - 1985

Access to Document

10.1063/1.95847

Cite this

@article{ab1fbc2aec8a44429f0f5926b01e309e,

title = "Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments",

abstract = "We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.",

author = "Yoram Shapira and J. Bregman and Z. Calahorra",

year = "1985",

doi = "10.1063/1.95847",

language = "אנגלית",

volume = "46",

pages = "48--50",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments

AU - Shapira, Yoram

AU - Bregman, J.

AU - Calahorra, Z.

PY - 1985

Y1 - 1985

N2 - We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.

AB - We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.

UR - https://www.scopus.com/pages/publications/0021819070

U2 - 10.1063/1.95847

DO - 10.1063/1.95847

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:0021819070

SN - 0003-6951

VL - 46

SP - 48

EP - 50

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 1

ER -

Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments

Abstract

Access to Document

Other files and links

Fingerprint

Cite this