Observation of the trend of interface formation in anodic native oxide on InSb by marker experiments

Yoram Shapira*, J. Bregman, Z. Calahorra

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.

Original languageEnglish
Pages (from-to)48-50
Number of pages3
JournalApplied Physics Letters
Volume46
Issue number1
DOIs
StatePublished - 1985

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