Abstract
We have investigated the trend of anodization of InSb by predeposition of a very thin Cr layer, acting as a marker. Results of Auger electron spectroscopy show that the oxidation process is carried out by oxygen in diffusion through the oxide film. The details and implications of this observation are discussed.
Original language | English |
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Pages (from-to) | 48-50 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 46 |
Issue number | 1 |
DOIs | |
State | Published - 1985 |