Nucleation effects of tungsten chemical vapor deposition on B 2H6 pre-treated titanium nitride for sub-45 nm contacts

Avraham Rozenblat*, Rotem Drori, Maor Rotlain, Yosi Shacham-Diamand, Dror Horvitz

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Engineering & Materials Science

Chemistry