A technique for alloy sample preparation, based on thin film deposition, has been developed for a study of binary and ternary compositions. Thin elemental wedge-shaped layers of the components were gradually sputtered in an alternating manner to form multilayered structure. The samples obtained had compositions which depended upon their location on the substrate. Such samples, containing differently composed AuAgCu alloys were heat treated to promote formation of stable phases. The alloys thus formed were studied by X-ray diffraction and various microscopic techniques. This article demonstrates the advantages of this method over conventional bulk-based methods.