TY - GEN
T1 - Novel dual-axisal so1 micromachined inertial sensors with optical sensing
T2 - 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, IEEEI 2000
AU - Bochobza-Degani, O.
AU - Seter, D. J.
AU - Socher, E.
AU - Nemirovsky, Y.
N1 - Publisher Copyright:
©2000 IEEE.
PY - 2000
Y1 - 2000
N2 - A new design of micromachined inertial sensors, accelerometer and rate-gyroscope, is presented. The design employs the modulated integrative differential optical sensing for the output motion sensing. The former uni-axial design with cantilever suspension is presented. Then the new dual-axis design with "spider" suspensions is discussed. The design and fabrication issues of the new design are discussed, in-light of the results of the uni-axial design. The predicted performance of this device is presented.
AB - A new design of micromachined inertial sensors, accelerometer and rate-gyroscope, is presented. The design employs the modulated integrative differential optical sensing for the output motion sensing. The former uni-axial design with cantilever suspension is presented. Then the new dual-axis design with "spider" suspensions is discussed. The design and fabrication issues of the new design are discussed, in-light of the results of the uni-axial design. The predicted performance of this device is presented.
UR - http://www.scopus.com/inward/record.url?scp=84953385774&partnerID=8YFLogxK
U2 - 10.1109/EEEI.2000.924321
DO - 10.1109/EEEI.2000.924321
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AN - SCOPUS:84953385774
T3 - 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings
SP - 65
EP - 68
BT - 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 11 April 2000 through 12 April 2000
ER -