Novel CMOS compatible frontside micromachining of integrated thermoelectric sensors

E. Socher*, O. Bochobza-Degani, Y. Nemirovsky

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Novel CMOS compatible frontside micromachining of integrated thermoelectric sensors'. Together they form a unique fingerprint.

Keyphrases

Engineering

Earth and Planetary Sciences

Material Science