TY - JOUR
T1 - Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation
AU - Ya'akobovitz, Assaf
AU - Krylov, Slava
AU - Hanein, Yael
PY - 2010/7
Y1 - 2010/7
N2 - Recent progress achieved in the fields of micro and nanoelectromechanical systems demands a reliable method for high resolution characterization of electrostatically actuated devices. This paper presents a study on optical detection of nanoscale displacements using digital image correlation (DIC) algorithms, commonly used in characterization of in-plane displacements. Optical images of an electrostatically actuated micro electromechanical systems (MEMS) device were processed using a modified drift corrected DIC (DC-DIC) algorithm and the results were analyzed. Using the DC-DIC, the resolution was enhanced significantly and displacement measurements with nanoscale accuracy were captured using standard optics and processing tools. The present study provides a simple and reliable technique for optical characterization of rigid body nanoscale displacements of micro devices.
AB - Recent progress achieved in the fields of micro and nanoelectromechanical systems demands a reliable method for high resolution characterization of electrostatically actuated devices. This paper presents a study on optical detection of nanoscale displacements using digital image correlation (DIC) algorithms, commonly used in characterization of in-plane displacements. Optical images of an electrostatically actuated micro electromechanical systems (MEMS) device were processed using a modified drift corrected DIC (DC-DIC) algorithm and the results were analyzed. Using the DC-DIC, the resolution was enhanced significantly and displacement measurements with nanoscale accuracy were captured using standard optics and processing tools. The present study provides a simple and reliable technique for optical characterization of rigid body nanoscale displacements of micro devices.
KW - Digital image correlation
KW - Drift distortion
KW - MEMS
KW - Nanoscale displacement
KW - Optical measurement
UR - http://www.scopus.com/inward/record.url?scp=77955428158&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2010.05.014
DO - 10.1016/j.sna.2010.05.014
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AN - SCOPUS:77955428158
SN - 0924-4247
VL - 162
SP - 1
EP - 7
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1
ER -