Nanolithography toolbox: Device design at the nanoscale

K. C. Balram; D. A. Westly; M. Davanco; K. E. Grutter; Q. Li; T. Michels; C. H. Ray; L. Yu; R. J. Kasica; C. B. Wallin; I. J. Gilbert; Brian A. Bryce; G. Simelgor; J. Topolancik; N. Lobontiu; Y. Liu; P. Neuzil; V. Svatos; K. A. Dill; N. A. Bertrand; M. Metzler; G. Lopez; D. A. Czaplewski; L. Ocola; K. A. Srinivasan; S. M. Stavis; V. A. Aksyuk; J. A. Liddle; S. Krylov; B. R. Ilic

doi:10.1364/CLEO_AT.2017.ATh3B.6

Nanolithography toolbox: Device design at the nanoscale

K. C. Balram, D. A. Westly, M. Davanco, K. E. Grutter, Q. Li, T. Michels, C. H. Ray, L. Yu, R. J. Kasica, C. B. Wallin, I. J. Gilbert, Brian A. Bryce, G. Simelgor, J. Topolancik, N. Lobontiu, Y. Liu, P. Neuzil, V. Svatos, K. A. Dill, N. A. BertrandM. Metzler, G. Lopez, D. A. Czaplewski, L. Ocola, K. A. Srinivasan, S. M. Stavis, V. A. Aksyuk, J. A. Liddle, S. Krylov, B. R. Ilic

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Original language	English
Title of host publication	2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-2
Number of pages	2
ISBN (Electronic)	9781943580279
DOIs	https://doi.org/10.1364/CLEO_AT.2017.ATh3B.6
State	Published - 25 Oct 2017
Event	2017 Conference on Lasers and Electro-Optics, CLEO 2017 - San Jose, United States Duration: 14 May 2017 → 19 May 2017

Publication series

Name	2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
Volume	2017-January

Conference

Conference	2017 Conference on Lasers and Electro-Optics, CLEO 2017
Country/Territory	United States
City	San Jose
Period	14/05/17 → 19/05/17

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10.1364/CLEO_AT.2017.ATh3B.6

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Balram, K. C., Westly, D. A., Davanco, M., Grutter, K. E., Li, Q., Michels, T., Ray, C. H., Yu, L., Kasica, R. J., Wallin, C. B., Gilbert, I. J., Bryce, B. A., Simelgor, G., Topolancik, J., Lobontiu, N., Liu, Y., Neuzil, P., Svatos, V., Dill, K. A., ... Ilic, B. R. (2017). Nanolithography toolbox: Device design at the nanoscale. In 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings (pp. 1-2). (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; Vol. 2017-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1364/CLEO_AT.2017.ATh3B.6

@inproceedings{58a60756f6a445908069af8ad52e20bc,

title = "Nanolithography toolbox: Device design at the nanoscale",

abstract = "We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.",

author = "Balram, {K. C.} and Westly, {D. A.} and M. Davanco and Grutter, {K. E.} and Q. Li and T. Michels and Ray, {C. H.} and L. Yu and Kasica, {R. J.} and Wallin, {C. B.} and Gilbert, {I. J.} and Bryce, {Brian A.} and G. Simelgor and J. Topolancik and N. Lobontiu and Y. Liu and P. Neuzil and V. Svatos and Dill, {K. A.} and Bertrand, {N. A.} and M. Metzler and G. Lopez and Czaplewski, {D. A.} and L. Ocola and Srinivasan, {K. A.} and Stavis, {S. M.} and Aksyuk, {V. A.} and Liddle, {J. A.} and S. Krylov and Ilic, {B. R.}",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 Conference on Lasers and Electro-Optics, CLEO 2017 ; Conference date: 14-05-2017 Through 19-05-2017",

year = "2017",

month = oct,

day = "25",

doi = "10.1364/CLEO_AT.2017.ATh3B.6",

language = "אנגלית",

series = "2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1--2",

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address = "ארצות הברית",

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Balram, KC, Westly, DA, Davanco, M, Grutter, KE, Li, Q, Michels, T, Ray, CH, Yu, L, Kasica, RJ, Wallin, CB, Gilbert, IJ, Bryce, BA, Simelgor, G, Topolancik, J, Lobontiu, N, Liu, Y, Neuzil, P, Svatos, V, Dill, KA, Bertrand, NA, Metzler, M, Lopez, G, Czaplewski, DA, Ocola, L, Srinivasan, KA, Stavis, SM, Aksyuk, VA, Liddle, JA, Krylov, S & Ilic, BR 2017, Nanolithography toolbox: Device design at the nanoscale. in 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings, vol. 2017-January, Institute of Electrical and Electronics Engineers Inc., pp. 1-2, 2017 Conference on Lasers and Electro-Optics, CLEO 2017, San Jose, United States, 14/05/17. https://doi.org/10.1364/CLEO_AT.2017.ATh3B.6

Nanolithography toolbox: Device design at the nanoscale. / Balram, K. C.; Westly, D. A.; Davanco, M. et al.
2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-2 (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; Vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Nanolithography toolbox

T2 - 2017 Conference on Lasers and Electro-Optics, CLEO 2017

AU - Balram, K. C.

AU - Westly, D. A.

AU - Davanco, M.

AU - Grutter, K. E.

AU - Li, Q.

AU - Michels, T.

AU - Ray, C. H.

AU - Yu, L.

AU - Kasica, R. J.

AU - Wallin, C. B.

AU - Gilbert, I. J.

AU - Bryce, Brian A.

AU - Simelgor, G.

AU - Topolancik, J.

AU - Lobontiu, N.

AU - Liu, Y.

AU - Neuzil, P.

AU - Svatos, V.

AU - Dill, K. A.

AU - Bertrand, N. A.

AU - Metzler, M.

AU - Lopez, G.

AU - Czaplewski, D. A.

AU - Ocola, L.

AU - Srinivasan, K. A.

AU - Stavis, S. M.

AU - Aksyuk, V. A.

AU - Liddle, J. A.

AU - Krylov, S.

AU - Ilic, B. R.

PY - 2017/10/25

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AB - We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

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T3 - 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings

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BT - 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

Y2 - 14 May 2017 through 19 May 2017

ER -

Balram KC, Westly DA, Davanco M, Grutter KE, Li Q, Michels T et al. Nanolithography toolbox: Device design at the nanoscale. In 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-2. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings). doi: 10.1364/CLEO_AT.2017.ATh3B.6

Nanolithography toolbox: Device design at the nanoscale

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