Nanocrystalline Conformal Diffusion Barriers for Copper Metallization

M. Eizenberg, Amit Kohn, S. Joseph

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageAmerican English
Title of host publicationAdvanced Metallization Conference 2002 (AMC 2002)
EditorsBradley M. Melnick, Timothy S. Cale, Shigeaki Zaima, Tomohiro Ohta
Number of pages1
StatePublished - 2003
EventAdvanced Metallization Conference 2002 (AMC 2002) - San Diego, United States
Duration: 1 Oct 20023 Oct 2002

Publication series

NameMaterials Research Society conference proceedings
PublisherMaterials Research Society


ConferenceAdvanced Metallization Conference 2002 (AMC 2002)
Abbreviated titleAMC 2002
Country/TerritoryUnited States
CitySan Diego

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