Multiarray Micromachined Probe for Turbulence Measurements Assembled of Suspended Hot-Film Sensors

Youry Borisenkov, Michael Kholmyansky, Slava Krylov, Alex Liberzon, Arkady Tsinober

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

To meet the need to access experimentally the full tensor of velocity derivatives at smallest scales of turbulent flows, we developed, fabricated, and tested an out-of-plane micromachined hot-film sensor that has a suspended 100-nm thick sensing element. We present a unique multiarray hot-film probe as an assembly of five arrays of four sensors each. Experimental results demonstrate the improved resolution of the sensor compared with a conventional hot-wire and to a nonsuspended version of such a sensor. A simple and clear method for sensor spatial resolution evaluation is also discussed.

Original languageEnglish
Article number7081370
Pages (from-to)1503-1509
Number of pages7
JournalJournal of Microelectromechanical Systems
Volume24
Issue number5
DOIs
StatePublished - Oct 2015

Funding

FundersFunder number
German Israeli Foundation for Scientific Research and Development
German-Israeli Foundation for Scientific Research and Development
Israel Science Foundation
Seventh Framework Programme

    Keywords

    • Microelectromechanical devices
    • anemometers
    • thin film devices.
    • velocity measurements

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