TY - JOUR
T1 - Multiarray Micromachined Probe for Turbulence Measurements Assembled of Suspended Hot-Film Sensors
AU - Borisenkov, Youry
AU - Kholmyansky, Michael
AU - Krylov, Slava
AU - Liberzon, Alex
AU - Tsinober, Arkady
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2015/10
Y1 - 2015/10
N2 - To meet the need to access experimentally the full tensor of velocity derivatives at smallest scales of turbulent flows, we developed, fabricated, and tested an out-of-plane micromachined hot-film sensor that has a suspended 100-nm thick sensing element. We present a unique multiarray hot-film probe as an assembly of five arrays of four sensors each. Experimental results demonstrate the improved resolution of the sensor compared with a conventional hot-wire and to a nonsuspended version of such a sensor. A simple and clear method for sensor spatial resolution evaluation is also discussed.
AB - To meet the need to access experimentally the full tensor of velocity derivatives at smallest scales of turbulent flows, we developed, fabricated, and tested an out-of-plane micromachined hot-film sensor that has a suspended 100-nm thick sensing element. We present a unique multiarray hot-film probe as an assembly of five arrays of four sensors each. Experimental results demonstrate the improved resolution of the sensor compared with a conventional hot-wire and to a nonsuspended version of such a sensor. A simple and clear method for sensor spatial resolution evaluation is also discussed.
KW - Microelectromechanical devices
KW - anemometers
KW - thin film devices.
KW - velocity measurements
UR - http://www.scopus.com/inward/record.url?scp=84926688551&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2015.2417213
DO - 10.1109/JMEMS.2015.2417213
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AN - SCOPUS:84926688551
SN - 1057-7157
VL - 24
SP - 1503
EP - 1509
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 5
M1 - 7081370
ER -