Morphological evolution of epitaxial cobalt-semiconductor compound layers during growth in a scanning tunneling microscope

I. Goldfarb*, G. A.D. Briggs

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

An attempt is made to shed light on the factors that affect surface morphology of ultrathin heteroepitaxial cobalt-semiconductor compound layers in relation to the kinetics of phase formation in those layers. An explanation is proposed, which relates the layer's surface morphology to the layer-substrate mismatch as a function of a particular sequence of kinetically driven phase-formation processes.

Original languageEnglish
Pages (from-to)1419-1426
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number4
DOIs
StatePublished - Jul 2002
EventProceedings of the 29th Conference on the Physics and Chemistry of Semiconductor Interfaces - Santa Fe, NM, United States
Duration: 6 Jan 200210 Jan 2002

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