TY - JOUR
T1 - Monolithic Integration of a Silicon Nanowire Field-Effect Transistors Array on a Complementary Metal-Oxide Semiconductor Chip for Biochemical Sensor Applications
AU - Livi, Paolo
AU - Kwiat, Moria
AU - Shadmani, Amir
AU - Pevzner, Alexander
AU - Navarra, Giulio
AU - Rothe, Jörg
AU - Stettler, Alexander
AU - Chen, Yihui
AU - Patolsky, Fernando
AU - Hierlemann, Andreas
N1 - Publisher Copyright:
© 2015 American Chemical Society.
PY - 2015/10/6
Y1 - 2015/10/6
N2 - We present a monolithic complementary metal-oxide semiconductor (CMOS)-based sensor system comprising an array of silicon nanowire field-effect transistors (FETs) and the signal-conditioning circuitry on the same chip. The silicon nanowires were fabricated by chemical vapor deposition methods and then transferred to the CMOS chip, where Ti/Pd/Ti contacts had been patterned via e-beam lithography. The on-chip circuitry measures the current flowing through each nanowire FET upon applying a constant source-drain voltage. The analog signal is digitized on chip and then transmitted to a receiving unit. The system has been successfully fabricated and tested by acquiring I-V curves of the bare nanowire-based FETs. Furthermore, the sensing capabilities of the complete system have been demonstrated by recording current changes upon nanowire exposure to solutions of different pHs, as well as by detecting different concentrations of Troponin T biomarkers (cTnT) through antibody-functionalized nanowire FETs.
AB - We present a monolithic complementary metal-oxide semiconductor (CMOS)-based sensor system comprising an array of silicon nanowire field-effect transistors (FETs) and the signal-conditioning circuitry on the same chip. The silicon nanowires were fabricated by chemical vapor deposition methods and then transferred to the CMOS chip, where Ti/Pd/Ti contacts had been patterned via e-beam lithography. The on-chip circuitry measures the current flowing through each nanowire FET upon applying a constant source-drain voltage. The analog signal is digitized on chip and then transmitted to a receiving unit. The system has been successfully fabricated and tested by acquiring I-V curves of the bare nanowire-based FETs. Furthermore, the sensing capabilities of the complete system have been demonstrated by recording current changes upon nanowire exposure to solutions of different pHs, as well as by detecting different concentrations of Troponin T biomarkers (cTnT) through antibody-functionalized nanowire FETs.
UR - http://www.scopus.com/inward/record.url?scp=84943170304&partnerID=8YFLogxK
U2 - 10.1021/acs.analchem.5b02604
DO - 10.1021/acs.analchem.5b02604
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C2 - 26348408
AN - SCOPUS:84943170304
SN - 0003-2700
VL - 87
SP - 9982
EP - 9990
JO - Analytical Chemistry
JF - Analytical Chemistry
IS - 19
ER -