Monolithic coupling of a SU8 waveguide to a silicon photodiode

M. Nathan; O. Levy; I. Goldfarb; A. Ruzin

doi:10.1063/1.1625778

Monolithic coupling of a SU8 waveguide to a silicon photodiode

M. Nathan^*, O. Levy, I. Goldfarb, A. Ruzin

^*Corresponding author for this work

Tel Aviv University

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

Light coupling from SU8 waveguides into silicon p-n photodiodes in monolithically integrated structures was discussed. Various advantages of SU8 such as it is photoresist, it is easy to process and have great flexibility in varying the thickness from submicron to hundreds of microns were also discussed. The results show that good coupling efficiencies can be achieved without the complicated processes involved in ARROW structures. It was also found that SU8 is advantageous in MOEMS processing as it also serves as a mechanical element material.

Original language	English
Pages (from-to)	7932-7934
Number of pages	3
Journal	Journal of Applied Physics
Volume	94
Issue number	12
DOIs	https://doi.org/10.1063/1.1625778
State	Published - 15 Dec 2003

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Monolithic coupling of a SU8 waveguide to a silicon photodiode

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