Modeling the electro-thermal response of thermally isolated micromachined distributed structures

Keyphrases

• Micromachining 100%
• Distributed Structure 100%
• Electrothermal Response 100%
• Polysilicon 33%
• Local Temperature 33%
• Applied Voltage 33%
• Material Type 33%
• Current Control 33%
• Voltage Control 33%
• Thermal Instability 33%
• Numerical Scheme 33%
• Work Analysis 33%
• Applied Current 33%
• Micro-bridge 33%
• Resistive Structure 33%
• Heat Balance Equation 33%
• Surface Micromachining 33%
• Novel numerical 33%
• Electro-thermal Problem 33%
• Resistance Dependence 33%
• Electrothermal Behavior 33%

Engineering

• Resistive 100%
• Good Agreement 50%
• Measured Data 50%
• Balance Equation 50%
• Numerical Scheme 50%
• Polysilicon 50%
• Thermal Behavior 50%
• Thermal Problem 50%
• Heat Balance 50%