Modeling the electro-thermal response of thermally isolated micromachined distributed structures

Eran Socher; Ofir Bochobza-Degani; David Elata; Yael Nemirovsky

Modeling the electro-thermal response of thermally isolated micromachined distributed structures

Eran Socher^*, Ofir Bochobza-Degani, David Elata, Yael Nemirovsky

^*Corresponding author for this work

Technion-Israel Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. Micromachined resistive microbridges are modeled using a quasi-ID heat balance equation taking into account the resistance dependence upon local temperature. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The scheme is based on applied temperature rather than applied current or voltage. The novel scheme can capture the thermal instabilities under both voltage and current control, for various types of materials. The model is compared with experimental data measured on surface micromachined polysilicon structures, showing good agreement.

Original language	English
Title of host publication	2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Editors	M. Laudon, B. Romanowicz
Pages	384-387
Number of pages	4
State	Published - 2003
Externally published	Yes
Event	2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States Duration: 23 Feb 2003 → 27 Feb 2003

Publication series

Name	2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Volume	1

Conference

Conference	2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Country/Territory	United States
City	San Francisco, CA
Period	23/02/03 → 27/02/03

Keywords

Electro-thermal instability
Electro-thermal modeling
MEMS
Micro-electro-thermal devices
Thermal runaway

Cite this

@inproceedings{b05782af1bc4418e9fb8e71020e8805e,

title = "Modeling the electro-thermal response of thermally isolated micromachined distributed structures",

abstract = "This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. Micromachined resistive microbridges are modeled using a quasi-ID heat balance equation taking into account the resistance dependence upon local temperature. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The scheme is based on applied temperature rather than applied current or voltage. The novel scheme can capture the thermal instabilities under both voltage and current control, for various types of materials. The model is compared with experimental data measured on surface micromachined polysilicon structures, showing good agreement.",

keywords = "Electro-thermal instability, Electro-thermal modeling, MEMS, Micro-electro-thermal devices, Thermal runaway",

author = "Eran Socher and Ofir Bochobza-Degani and David Elata and Yael Nemirovsky",

year = "2003",

language = "אנגלית",

isbn = "0972842209",

series = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",

pages = "384--387",

editor = "M. Laudon and B. Romanowicz",

booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",

note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",

}

Socher, E, Bochobza-Degani, O, Elata, D & Nemirovsky, Y 2003, Modeling the electro-thermal response of thermally isolated micromachined distributed structures. in M Laudon & B Romanowicz (eds), 2003 Nanotechnology Conference and Trade Show - Nanotech 2003. 2003 Nanotechnology Conference and Trade Show - Nanotech 2003, vol. 1, pp. 384-387, 2003 Nanotechnology Conference and Trade Show - Nanotech 2003, San Francisco, CA, United States, 23/02/03.

Modeling the electro-thermal response of thermally isolated micromachined distributed structures. / Socher, Eran; Bochobza-Degani, Ofir; Elata, David et al.
2003 Nanotechnology Conference and Trade Show - Nanotech 2003. ed. / M. Laudon; B. Romanowicz. 2003. p. 384-387 (2003 Nanotechnology Conference and Trade Show - Nanotech 2003; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Modeling the electro-thermal response of thermally isolated micromachined distributed structures

AU - Socher, Eran

AU - Bochobza-Degani, Ofir

AU - Elata, David

AU - Nemirovsky, Yael

PY - 2003

Y1 - 2003

N2 - This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. Micromachined resistive microbridges are modeled using a quasi-ID heat balance equation taking into account the resistance dependence upon local temperature. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The scheme is based on applied temperature rather than applied current or voltage. The novel scheme can capture the thermal instabilities under both voltage and current control, for various types of materials. The model is compared with experimental data measured on surface micromachined polysilicon structures, showing good agreement.

AB - This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. Micromachined resistive microbridges are modeled using a quasi-ID heat balance equation taking into account the resistance dependence upon local temperature. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The scheme is based on applied temperature rather than applied current or voltage. The novel scheme can capture the thermal instabilities under both voltage and current control, for various types of materials. The model is compared with experimental data measured on surface micromachined polysilicon structures, showing good agreement.

KW - Electro-thermal instability

KW - Electro-thermal modeling

KW - MEMS

KW - Micro-electro-thermal devices

KW - Thermal runaway

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T3 - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003

SP - 384

EP - 387

BT - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003

A2 - Laudon, M.

A2 - Romanowicz, B.

T2 - 2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Y2 - 23 February 2003 through 27 February 2003

ER -

Modeling the electro-thermal response of thermally isolated micromachined distributed structures

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Publication series

Conference

Keywords

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