Modal Behavior of Microcantilevers Arrays with Tunable Electrostatic Coupling

Keyphrases

• Modal Behavior 100%
• Cantilever Array 100%
• Electrostatic Coupling 100%
• Eigenvector 66%
• Reduced Order Model 33%
• Eigenvalues 33%
• Resonant Dynamics 33%
• Strongly Coupled 33%
• Spectral Content 33%
• Voltage Dependence 33%
• Fringing Field 33%
• Parametric Resonance 33%
• Damping System 33%
• Coupled Array 33%
• Two-beam 33%
• Resonant Sensor 33%
• Resonance Behavior 33%
• Coupling Voltage 33%
• Mass-spring System 33%
• Three-beam 33%
• Four-beam 33%
• Microcantilever 33%
• Large-scale Beam 33%
• Equivalent Mass 33%
• Beam Array 33%
• Assumed Modes 33%

Engineering

• Microcantilevers 100%
• Electrostatic Coupling 100%
• Eigenvector 66%
• Reduced Order Model 33%
• Eigenvalue 33%
• Parametric Resonance 33%
• Damped System 33%
• Resonant Sensor 33%
• Micro-Cantilevers 33%
• Mass-Spring System 33%