Micromechanical Bistable Flow Sensors

Slava Krylov, Yoav Kessler, Erez Benjamin, Ben Torteman, Alex Liberzon

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Bistable microstructures demonstrate enhanced responsiveness to external stimuli in the vicinity of the critical configurations that separate stable and unstable states. This makes these devices attractive candidates for implementation in sensors. Here, after a short review of existing bistability-based sensing approaches, we explore the applicability of electrostatically and electro thermally actuated micro beams as flow sensors. Double clamped curved ≈ 1000 μ m long, ≈ 2.8μ m wide and ≈50 μ m thick beams, deep reactive ion etched (DRIE) from a silicon on insulator (SOI) wafer were subject to an air flow in the direction perpendicular to the beam. We show theoretically and experimentally that both the flow-induced cooling of the Joule's heated structure and the drag force reduce the critical snap-through (ST) voltages. The absolute and relative measured sensitivities of the ST voltage of ≈ 1.9 Vsm -1 and ≈ 2.6 % sm -1 , respectively, are consistent with the Reduced Order (RO) Galerkin model predictions.

Original languageEnglish
Title of host publication2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538647073
StatePublished - 26 Dec 2018
Event17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India
Duration: 28 Oct 201831 Oct 2018

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Conference17th IEEE SENSORS Conference, SENSORS 2018
CityNew Delhi


Dive into the research topics of 'Micromechanical Bistable Flow Sensors'. Together they form a unique fingerprint.

Cite this