TY - JOUR
T1 - Micromachining of non-fouling coatings for bio-MEMS applications
AU - Hanein, Yael
AU - Pan, Y. Vickie
AU - Ratner, Buddy D.
AU - Denton, Denice D.
AU - Böhringer, Karl F.
N1 - Funding Information:
The authors wish to thank Mark Holl, Mark Troll, Russell Wyeth and Dennis Willows for very useful discussions. This work was supported in part by the NSF–ERC program Grant # EEC-9529161. ESCA Experiments done at NESAC/BIO were supported by NIH NCRR Grant RR-01296. Work in the UW MEMS lab by Y. Hanein and K. Böhringer was supported in part by David and Lucile Packard Foundation Grant 2000-01763, DARPA Bio:Info:Micro Grant MD A972-01-1-002, Washington Technology Center awards WTC MEMS 99-8 and 99-A, NSF CISE Postdoctoral Research Associateship EIA-0072744 to Y. Hanein, NSF Career Award ECS-9875367 to K. Böhringer and by Microsoft Research, Intel Corporation, and Tanner Research Inc.
PY - 2001/12/15
Y1 - 2001/12/15
N2 - Standard photolithography is used to pattern a poly (ethylene glycol) (PEG)-like polymer onto silicon substrates. The coating has excellent non-fouling properties and good adhesion to various substrate materials, such as silicon, oxide, nitride, gold, and platinum. This method allows precise control of the shape, size and alignment of the polymer, thus providing a reliable tool to pattern protein sheets as well as cell cultures. This method also enables the incorporation of patterned cell cultures with various predefined elements such as electrodes, channels, and sensors. To demonstrate the properties of our technique, we apply it to build cell cultures and to protect metallic electrodes from protein and cell adhesion. We show that the thin coatings provide excellent protection without compromising the conductivity of the electrodes.
AB - Standard photolithography is used to pattern a poly (ethylene glycol) (PEG)-like polymer onto silicon substrates. The coating has excellent non-fouling properties and good adhesion to various substrate materials, such as silicon, oxide, nitride, gold, and platinum. This method allows precise control of the shape, size and alignment of the polymer, thus providing a reliable tool to pattern protein sheets as well as cell cultures. This method also enables the incorporation of patterned cell cultures with various predefined elements such as electrodes, channels, and sensors. To demonstrate the properties of our technique, we apply it to build cell cultures and to protect metallic electrodes from protein and cell adhesion. We show that the thin coatings provide excellent protection without compromising the conductivity of the electrodes.
KW - Bio-MEMS
KW - Bio-fouling
KW - Cell cultures
KW - Proteins
UR - http://www.scopus.com/inward/record.url?scp=0035892610&partnerID=8YFLogxK
U2 - 10.1016/S0925-4005(01)00925-X
DO - 10.1016/S0925-4005(01)00925-X
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AN - SCOPUS:0035892610
SN - 0925-4005
VL - 81
SP - 49
EP - 54
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 1
ER -
