Micromachining of non-fouling coatings for bio-MEMS applications

Yael Hanein*, Y. Vickie Pan, Buddy D. Ratner, Denice D. Denton, Karl F. Böhringer

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Standard photolithography is used to pattern a poly (ethylene glycol) (PEG)-like polymer onto silicon substrates. The coating has excellent non-fouling properties and good adhesion to various substrate materials, such as silicon, oxide, nitride, gold, and platinum. This method allows precise control of the shape, size and alignment of the polymer, thus providing a reliable tool to pattern protein sheets as well as cell cultures. This method also enables the incorporation of patterned cell cultures with various predefined elements such as electrodes, channels, and sensors. To demonstrate the properties of our technique, we apply it to build cell cultures and to protect metallic electrodes from protein and cell adhesion. We show that the thin coatings provide excellent protection without compromising the conductivity of the electrodes.

Original languageEnglish
Pages (from-to)49-54
Number of pages6
JournalSensors and Actuators, B: Chemical
Issue number1
StatePublished - 15 Dec 2001
Externally publishedYes


FundersFunder number
Tanner Research Inc.
National Science Foundation
David and Lucile Packard Foundation2000-01763
Defense Advanced Research Projects AgencyEIA-0072744, MD A972-01-1-002, ECS-9875367
Intel Corporation
Microsoft Research
European Research CouncilEEC-9529161


    • Bio-MEMS
    • Bio-fouling
    • Cell cultures
    • Proteins


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