Micromachined accelerometer with modulated integrative differential optical sensing

O. Degani, D. Seter, E. Socher, S. Kaldor, Y. Nemirovsky

Research output: Contribution to journalArticlepeer-review


A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10μg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported.

Original languageEnglish
Pages (from-to)654-655
Number of pages2
JournalElectronics Letters
Issue number7
StatePublished - 2 Apr 1998
Externally publishedYes


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