Micromachined accelerometer with modulated integrative differential optical sensing

O. Degani; D. Seter; E. Socher; S. Kaldor; Y. Nemirovsky

doi:10.1049/el:19980484

Micromachined accelerometer with modulated integrative differential optical sensing

O. Degani^*, D. Seter, E. Socher, S. Kaldor, Y. Nemirovsky

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10μg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported.

Original language	English
Pages (from-to)	654-655
Number of pages	2
Journal	Electronics Letters
Volume	34
Issue number	7
DOIs	https://doi.org/10.1049/el:19980484
State	Published - 2 Apr 1998
Externally published	Yes

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abstract = "A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10μg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported.",

author = "O. Degani and D. Seter and E. Socher and S. Kaldor and Y. Nemirovsky",

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AU - Degani, O.

AU - Seter, D.

AU - Socher, E.

AU - Kaldor, S.

AU - Nemirovsky, Y.

PY - 1998/4/2

Y1 - 1998/4/2

N2 - A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10μg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported.

AB - A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10μg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported.

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Micromachined accelerometer with modulated integrative differential optical sensing

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