Microfluidic optomechanical oscillators

G. Bahl*, K. H. Kim, W. Lee, J. Liu, X. Fan, T. Carmon

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We demonstrate a new class of fused silica MEMS that bridge between optomechanical and fluidic microsystems. Since fused silica is non-conductive and optically transparent, we employ "touch-less" excitation by means of optical electrostriction and radiation pressure to excite surface-acoustic-wave whispering gallery modes and wineglass modes in these devices. This is the first demonstration of mechanical vibration that interacts with fluids excited in a microstructure via optical forces. These mechanical oscillators operate over several orders-of-magnitude in frequency from 8.5 MHz-11 GHz.

Original languageEnglish
Title of host publication2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
EditorsMehran Mehregany, David J. Monk
PublisherTransducer Research Foundation
Pages96-97
Number of pages2
ISBN (Electronic)9780964002494
DOIs
StatePublished - 2012
Externally publishedYes
Event2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States
Duration: 3 Jun 20127 Jun 2012

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Country/TerritoryUnited States
CityHilton Head
Period3/06/127/06/12

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