@inproceedings{823100001d844b81ae6c5c5db47d9a86,
title = "Metallization technologies and strategies for plastic based biochips, sensors and actuators for healthcare and medical applications",
abstract = "Metallization on flexible MEMS is used for various applications such as interconnects, electrodes and flexible actuators, where the metal lines are embedded onto the polymeric structure. An important issue is the properties of the polymer/metal interface. We review various surface treatments and discuss in details functionalization using self assembled monolayer (SAM) and electron-beam irradiation that significantly improve metal/polymer adhesion. To demonstrate the highlights and problems of flexible MEMS metallization we review processes and structures of two applications: a. flexible electrodes on thin hard polyimide substrates and b. flexible actuators on thick soft PDMS.",
author = "Y. Shacham-Diamand and S. Krylov and T. Shmilovich and Almog, {R. Ofek} and N. Fishelson and Y. Sverdlov and I. Torchinsky and G. Rosenman and A. Inberg and O. Berkh",
year = "2009",
doi = "10.1149/1.3183726",
language = "אנגלית",
isbn = "9781566777377",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "1",
pages = "243--254",
booktitle = "ECS Transactions - Microelectronics Technology and Devices - SBMicro 2009",
edition = "1",
note = "24th International Symposium on Microelectronics Technology and Devices - SBMicro 2009 ; Conference date: 31-08-2009 Through 03-09-2009",
}