Metallization technologies and strategies for plastic based biochips, sensors and actuators for healthcare and medical applications

Y. Shacham-Diamand, S. Krylov, T. Shmilovich, R. Ofek Almog, N. Fishelson, Y. Sverdlov, I. Torchinsky, G. Rosenman, A. Inberg, O. Berkh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Metallization on flexible MEMS is used for various applications such as interconnects, electrodes and flexible actuators, where the metal lines are embedded onto the polymeric structure. An important issue is the properties of the polymer/metal interface. We review various surface treatments and discuss in details functionalization using self assembled monolayer (SAM) and electron-beam irradiation that significantly improve metal/polymer adhesion. To demonstrate the highlights and problems of flexible MEMS metallization we review processes and structures of two applications: a. flexible electrodes on thin hard polyimide substrates and b. flexible actuators on thick soft PDMS.

Original languageEnglish
Title of host publicationECS Transactions - Microelectronics Technology and Devices - SBMicro 2009
PublisherElectrochemical Society Inc.
Pages243-254
Number of pages12
Edition1
ISBN (Electronic)9781607680871
ISBN (Print)9781566777377
DOIs
StatePublished - 2009
Event24th International Symposium on Microelectronics Technology and Devices - SBMicro 2009 - Natal, Brazil
Duration: 31 Aug 20093 Sep 2009

Publication series

NameECS Transactions
Number1
Volume23
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference24th International Symposium on Microelectronics Technology and Devices - SBMicro 2009
Country/TerritoryBrazil
CityNatal
Period31/08/093/09/09

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