MEMS-based probes for velocity and pressure measurements in unsteady and turbulent flowfields

Othon K. Rediniotis, Espen S. Johansen, T. Tsao, A. Seifert, L. G. Pack

Research output: Contribution to conferencePaperpeer-review


This work presents our progress in the development of MEMS-based, high-performance, fast-response, multi-sensor pressure probes of miniature size for velocity and pressure measurement in unsteady and turbulent flowfields. The fabrication and calibration (theoretical and experimental) of miniature (order of 1mm in diameter) 5-sensor hemispherical-tip probes, are discussed. The first stages of the development process have been to fabricate a sensitive MEMS pressure sensor and to develop calibration algorithms and environments for fast-response probes. We fabricated first-generation bossed-diaphragm absolute pressure sensors 100×100 μm2 in size. One of the challenges in the pressure sensor development is the design of sensors with sensitivity sufficient for accurate measurements in flow conditions most commonly of interest to the scientific and industrial community. New probe calibration techniques are introduced. Both theoretical and experimental approaches are employed to develop calibration techniques suitable for unsteady and turbulent flow environments with fine time and length scales.

Original languageEnglish
StatePublished - 1999
Externally publishedYes
Event37th Aerospace Sciences Meeting and Exhibit, 1999 - Reno, United States
Duration: 11 Jan 199914 Jan 1999


Conference37th Aerospace Sciences Meeting and Exhibit, 1999
Country/TerritoryUnited States


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