Measurements of interface fracture and mechanical properties of low-k dielectric thin films

F. Atrash, D. Sherman

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationFracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture
EditorsE.E. Gdoutos
PublisherKluwer Academic Publishers
Pages917-918
Number of pages2
ISBN (Electronic)9781402049712
DOIs
StatePublished - 2006
Externally publishedYes
Event16th European Conference of Fracture - Alexandroupolis, Greece
Duration: 3 Jul 20067 Jul 2006

Publication series

NameFracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture

Conference

Conference16th European Conference of Fracture
Country/TerritoryGreece
CityAlexandroupolis
Period3/07/067/07/06

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