@inproceedings{eb433b5b48c144de804359fa38a82a55,
title = "Measurements of interface fracture and mechanical properties of low-k dielectric thin films",
author = "F. Atrash and D. Sherman",
year = "2006",
doi = "10.1007/1-4020-4972-2_454",
language = "אנגלית",
series = "Fracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture",
publisher = "Kluwer Academic Publishers",
pages = "917--918",
editor = "E.E. Gdoutos",
booktitle = "Fracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture",
address = "הולנד",
note = "null ; Conference date: 03-07-2006 Through 07-07-2006",
}