Measurement of ion flux as a function of background gas pressure in a Hot Refractory Anode Vacuum Arc

I. I. Beilis, A. Shashurin, R. L. Boxman

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The fraction of the ion flux in the radially expanding plasma flux was obtained in Hot Refractory Anode Vacuum Arc by measuring the ion current and the film deposition characteristics. Experiments were conducted with an arc current of 200 A, a molybdenum anode and an electrodes separation of about 10 mm. It was found that the collected ion current in vacuum increased about twice from the beginning of the arc (t<30 s) to developed HRAVA stage (t>50-60 s). The measured ion current in argon, nitrogen, and helium environments remained approximately constant with background gas pressure up to some critical pressure (15, 30, and 75 mTorr for argon, nitrogen and helium respectively), and then decreased with pressure eventually reaching zero. The ion fraction in total deposition flux was 0.6 in vacuum and decreased with nitrogen pressure except pressure range 10-100 mTorr where the local maximum about 0.8 was observed.

Original languageEnglish
Title of host publicationProceedings of the 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Pages364-367
Number of pages4
DOIs
StatePublished - 2006
Event22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV - Matsue, Japan
Duration: 25 Sep 200629 Sep 2006

Publication series

NameProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Volume1
ISSN (Print)1093-2941

Conference

Conference22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Country/TerritoryJapan
CityMatsue
Period25/09/0629/09/06

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