Mapping of non-planar surfaces and film conformality by alpha-particle energy loss spectroscopy

I. Kelson, C. V. Kaiser, Y. Levy, G. Biasiol, E. Kapon

Research output: Contribution to journalArticlepeer-review

Abstract

A method of mapping 3D periodic structures in the micron- and submicron range is presented. The method consists of implanting alpha-emitting nuclei close to the surface and measuring the emerging alpha-particles at various directions. Information about surface topography is then obtained from the number of alphas that are observed directly by the detector. Measuring the shift in energy due to deposition of overlayers permits the analysis of the conformality of films deposited on complex periodic structures. Typical applications include the characterization of gratings in semiconductor layers fabricated during the production of laser structures and of quantum wires. An experimental example for periodic V-grooves etched in GaAs is shown.

Original languageEnglish
Pages (from-to)483-488
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume170
Issue number3
DOIs
StatePublished - Oct 2000

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