Magnetic control in vacuum arc deposition a review

R. L. Boxman; I. I. Beilis; E. Gidalevich; V. N. Zhitomirsky

doi:10.1109/DEIV.2004.1422650

Magnetic control in vacuum arc deposition a review

R. L. Boxman^*, I. I. Beilis, E. Gidalevich, V. N. Zhitomirsky

^*Corresponding author for this work

Tel Aviv University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

The use of magnetic fields to control cathode spot location and motion and to collimate and direct the plasma flow in vacuum arc deposition apparatus is reviewed. Retrograde and acute angle motion are used to control the location and motion of cathode spots, in order to confine them to the cathode surface facing the substrates, to prevent local overheating, and to reduce macroparticle production. Axial fields are use to collimate cathode spot produced plasma jets, and to bend them around macoparticle occluding obstacles in filtered vacuum arc deposition. Advances have been made in understanding these phenomena, but theoretical models have not yet been formulated which can predict plasma behavior sufficiently well for apparatus design.

Original language	English
Title of host publication	Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Pages	473-479
Number of pages	7
DOIs	https://doi.org/10.1109/DEIV.2004.1422650
State	Published - 2004
Event	Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV - Yalta, Ukraine Duration: 27 Sep 2004 → 1 Oct 2004

Publication series

Name	Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Volume	2
ISSN (Print)	1093-2941

Conference

Conference	Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Country/Territory	Ukraine
City	Yalta
Period	27/09/04 → 1/10/04

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10.1109/DEIV.2004.1422650

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Boxman, R. L., Beilis, I. I., Gidalevich, E., & Zhitomirsky, V. N. (2004). Magnetic control in vacuum arc deposition a review. In Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV (pp. 473-479). Article 2B-Inv (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV; Vol. 2). https://doi.org/10.1109/DEIV.2004.1422650

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title = "Magnetic control in vacuum arc deposition a review",

abstract = "The use of magnetic fields to control cathode spot location and motion and to collimate and direct the plasma flow in vacuum arc deposition apparatus is reviewed. Retrograde and acute angle motion are used to control the location and motion of cathode spots, in order to confine them to the cathode surface facing the substrates, to prevent local overheating, and to reduce macroparticle production. Axial fields are use to collimate cathode spot produced plasma jets, and to bend them around macoparticle occluding obstacles in filtered vacuum arc deposition. Advances have been made in understanding these phenomena, but theoretical models have not yet been formulated which can predict plasma behavior sufficiently well for apparatus design.",

author = "Boxman, {R. L.} and Beilis, {I. I.} and E. Gidalevich and Zhitomirsky, {V. N.}",

year = "2004",

doi = "10.1109/DEIV.2004.1422650",

language = "אנגלית",

isbn = "078038461X",

series = "Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV",

pages = "473--479",

booktitle = "Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV",

note = "Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV ; Conference date: 27-09-2004 Through 01-10-2004",

}

Boxman, RL, Beilis, II, Gidalevich, E & Zhitomirsky, VN 2004, Magnetic control in vacuum arc deposition a review. in Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV., 2B-Inv, Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, vol. 2, pp. 473-479, Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Yalta, Ukraine, 27/09/04. https://doi.org/10.1109/DEIV.2004.1422650

Magnetic control in vacuum arc deposition a review. / Boxman, R. L.; Beilis, I. I.; Gidalevich, E. et al.
Proceedings - XXIth International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. 2004. p. 473-479 2B-Inv (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Magnetic control in vacuum arc deposition a review

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