Magnetic control in vacuum arc deposition: A review

Raymond L. Boxman; Isak I. Beilis; Evgeny Gidalevich; Vladimir N. Zhitomirsky

doi:10.1109/TPS.2005.856532

Magnetic control in vacuum arc deposition: A review

Raymond L. Boxman^*, Isak I. Beilis, Evgeny Gidalevich, Vladimir N. Zhitomirsky

^*Corresponding author for this work

Tel Aviv University

Research output: Contribution to journal › Review article › peer-review

44 Scopus citations

Abstract

The use of magnetic fields to control cathode spot location and' motion and to collimate and direct the plasma flow in vacuum arc deposition apparatus is reviewed. Retrograde and acute angle motion are used to control the location and motion of cathode spots, in order to confine them to the cathode surface facing the substrates, to prevent local overheating, and to reduce macroparticle production. Axial fields are use to collimate cathode spot produced plasma jets and to bend them around macroparticle-occluding obstacles in filtered vacuum arc deposition. Advances have been made in understanding these phenomena, but theoretical models have not yet been formulated which can predict plasma behavior sufficiently well for apparatus design.

Original language	English
Pages (from-to)	1618-1625
Number of pages	8
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	5 I
DOIs	https://doi.org/10.1109/TPS.2005.856532
State	Published - Oct 2005

Keywords

Cathode spots
Macroparticle filtering
Magnetic collimation
Magnetic steering
Retrograde motion
Vacuum arc
Vacuum arc deposition

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10.1109/TPS.2005.856532

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title = "Magnetic control in vacuum arc deposition: A review",

abstract = "The use of magnetic fields to control cathode spot location and' motion and to collimate and direct the plasma flow in vacuum arc deposition apparatus is reviewed. Retrograde and acute angle motion are used to control the location and motion of cathode spots, in order to confine them to the cathode surface facing the substrates, to prevent local overheating, and to reduce macroparticle production. Axial fields are use to collimate cathode spot produced plasma jets and to bend them around macroparticle-occluding obstacles in filtered vacuum arc deposition. Advances have been made in understanding these phenomena, but theoretical models have not yet been formulated which can predict plasma behavior sufficiently well for apparatus design.",

keywords = "Cathode spots, Macroparticle filtering, Magnetic collimation, Magnetic steering, Retrograde motion, Vacuum arc, Vacuum arc deposition",

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KW - Magnetic collimation

KW - Magnetic steering

KW - Retrograde motion

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Magnetic control in vacuum arc deposition: A review

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