Low-Loss Waveguide Fabrication by Inkjet Printing on Porous Silicon

Alexander Kellarev, Shlomo Ruschin

Research output: Contribution to journalArticlepeer-review

Abstract

We report fabrication of optical waveguides embedded in oxidized porous silicon in a maskless process. Patterned pore-filling was attained by means of inkjet printing, enabling lateral modification of the waveguide's index of refraction, and other optical properties, thus providing full two-dimensional refractive index control of the optical waveguide. The waveguides were created by applying a KDP salt solution over a porous silicon film by means of a material printer. Light guiding was demonstrated at wavelengths 1.064 and 1.550 μm. Measured values of the propagation loss at these wavelengths were 2.4 dB/cm and below 0.5 dB/cm, respectively.

Original languageEnglish
Article number8704920
Pages (from-to)3439-3443
Number of pages5
JournalJournal of Lightwave Technology
Volume37
Issue number14
DOIs
StatePublished - 15 Jul 2019

Keywords

  • Porous silicon
  • printing
  • waveguides

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