Long travel parallel plate electrostatic actuator

Viacheslav Krylov; Yacov Bernstain

doi:10.1109/SENSOR.2005.1496359

Long travel parallel plate electrostatic actuator

Viacheslav Krylov^*, Yacov Bernstain

^*Corresponding author for this work

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report on a novel long travel actuator architecture based on a folded suspension with an actuating force applied along initially curved suspension beams also used as motion amplifiers. The straightening of the beams is transformed into the lateral motion of the actuator. Combination of stiffening type mechanical and softening type electrostatic nonlinearities leads to the voltage-displacement dependence of the saturation type. The hierarchy of models includes an exact extensible elastica description and reduced order models. Actuators of various configurations were fabricated using SOI technology. The comparison between the experimental and model results reveals good agreement between the two.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	61-64
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1496359
State	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	1

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

Curved rod
Elastica
Large displacement actuator
Pull-in

Access to Document

10.1109/SENSOR.2005.1496359

Cite this

Krylov, V., & Bernstain, Y. (2005). Long travel parallel plate electrostatic actuator. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 61-64). Article 1C3.3 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1109/SENSOR.2005.1496359

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title = "Long travel parallel plate electrostatic actuator",

abstract = "We report on a novel long travel actuator architecture based on a folded suspension with an actuating force applied along initially curved suspension beams also used as motion amplifiers. The straightening of the beams is transformed into the lateral motion of the actuator. Combination of stiffening type mechanical and softening type electrostatic nonlinearities leads to the voltage-displacement dependence of the saturation type. The hierarchy of models includes an exact extensible elastica description and reduced order models. Actuators of various configurations were fabricated using SOI technology. The comparison between the experimental and model results reveals good agreement between the two.",

keywords = "Curved rod, Elastica, Large displacement actuator, Pull-in",

author = "Viacheslav Krylov and Yacov Bernstain",

year = "2005",

doi = "10.1109/SENSOR.2005.1496359",

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pages = "61--64",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

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Krylov, V & Bernstain, Y 2005, Long travel parallel plate electrostatic actuator. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 1C3.3, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 1, pp. 61-64, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496359

Long travel parallel plate electrostatic actuator. / Krylov, Viacheslav; Bernstain, Yacov.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 61-64 1C3.3 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - We report on a novel long travel actuator architecture based on a folded suspension with an actuating force applied along initially curved suspension beams also used as motion amplifiers. The straightening of the beams is transformed into the lateral motion of the actuator. Combination of stiffening type mechanical and softening type electrostatic nonlinearities leads to the voltage-displacement dependence of the saturation type. The hierarchy of models includes an exact extensible elastica description and reduced order models. Actuators of various configurations were fabricated using SOI technology. The comparison between the experimental and model results reveals good agreement between the two.

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Krylov V, Bernstain Y. Long travel parallel plate electrostatic actuator. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 61-64. 1C3.3. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1496359

Long travel parallel plate electrostatic actuator

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Keywords

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