Long travel parallel plate electrostatic actuator

Viacheslav Krylov*, Yacov Bernstain

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We report on a novel long travel actuator architecture based on a folded suspension with an actuating force applied along initially curved suspension beams also used as motion amplifiers. The straightening of the beams is transformed into the lateral motion of the actuator. Combination of stiffening type mechanical and softening type electrostatic nonlinearities leads to the voltage-displacement dependence of the saturation type. The hierarchy of models includes an exact extensible elastica description and reduced order models. Actuators of various configurations were fabricated using SOI technology. The comparison between the experimental and model results reveals good agreement between the two.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages61-64
Number of pages4
DOIs
StatePublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/TerritoryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Keywords

  • Curved rod
  • Elastica
  • Large displacement actuator
  • Pull-in

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