Localized heating, melting, and drilling of silicon

P. Livshits, V. Dikhtyar, E. Jerby*

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

2 Scopus citations


The microwave drill [1] is used in this study for a localized heating of silicon plates, up to the melting point. The paper presents the experimental setup, including the heating device and the temperature measurement techniques. The experimental results show a higher rate of local temperature increase compared to other known methods. This heating method enables localized thermal processes, jointing, welding, and even drilling of >0.1-mm diameter holes in silicon for MEMS applications.

Original languageEnglish
Number of pages1
StatePublished - 2004
Event2004 AIChE Annual Meeting - Austin, TX, United States
Duration: 7 Nov 200412 Nov 2004


Conference2004 AIChE Annual Meeting
Country/TerritoryUnited States
CityAustin, TX


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