Lifetime estimation of moems devices

T. Bar-Kohany, A. Stern

Research output: Contribution to journalArticlepeer-review

Abstract

Generally, microelectro mechanical systems (MOEMS) devices require encapsulation for protecting their fragile and tiny inner components in a hermetically sealed cavity. Cavity hermeticity can be critical to the device performance and plays a vital role with respect to reliability and long-term drift characteristics of the MOEMS products. The paper presents a theoretical approach for estimation of lifetime of MOEMS devices in terms of cavity's hermeticity to gases and water. The results are summarized as working maps for MOEMS packaging engineers, in terms of device cavity (internal package volume), equivalent leak rates, and equivalent size of interconnected defects in the bonding zone.

Original languageEnglish
Pages (from-to)144-148
Number of pages5
JournalJournal of Electronic Packaging, Transactions of the ASME
Volume129
Issue number2
DOIs
StatePublished - Jun 2007
Externally publishedYes

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