Laser processing of ion-exchange waveguides in glass

S. Ruschin, K. Sugioka, G. Yarom, T. Akane, K. Midorikawa

Research output: Contribution to journalArticlepeer-review


Using lasers at different wavelengths, the optical and geometrical properties of waveguides can be affected via photochemical, thermo-chemical and diffusion effects. In this paper we review several of these options and show experimental results. Among others, we report on refractive index modification and buried waveguide formation by UV-VUV laser irradiation and on controlled tapering of channel waveguides by thermal laser treatment.

Original languageEnglish
Pages (from-to)235-242
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002


  • Integrated optics
  • Laser microfabrication
  • Waveguides


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