Abstract
Using lasers at different wavelengths, the optical and geometrical properties of waveguides can be affected via photochemical, thermo-chemical and diffusion effects. In this paper we review several of these options and show experimental results. Among others, we report on refractive index modification and buried waveguide formation by UV-VUV laser irradiation and on controlled tapering of channel waveguides by thermal laser treatment.
Original language | English |
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Pages (from-to) | 235-242 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4637 |
DOIs | |
State | Published - 2002 |
Keywords
- Integrated optics
- Laser microfabrication
- Waveguides