TY - GEN
T1 - Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication
AU - Sirota, M.
AU - Lipavsky, B.
AU - Nuttman, D.
AU - Melech, N.
AU - Halevy, O.
AU - Krylov, S.
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - We report on a novel Laser-Induced Chemical Etching technology for fabrication of functional crystalline quartz MEMS resonant sensors. The suggested lithography-free fabrication approach does not alter the crystalline structure of quartz and allows piezoelectric actuation and high geometric design flexibility. The resonant force sensitive device, incorporating compliant amplification mechanism, was fabricated by the reported method and its functionality has been demonstrated.
AB - We report on a novel Laser-Induced Chemical Etching technology for fabrication of functional crystalline quartz MEMS resonant sensors. The suggested lithography-free fabrication approach does not alter the crystalline structure of quartz and allows piezoelectric actuation and high geometric design flexibility. The resonant force sensitive device, incorporating compliant amplification mechanism, was fabricated by the reported method and its functionality has been demonstrated.
KW - Crystalline quartz MEMS
KW - force amplification
KW - laser assistant etch
KW - quartz anisotropic etch
UR - http://www.scopus.com/inward/record.url?scp=85159056282&partnerID=8YFLogxK
U2 - 10.1109/INERTIAL56358.2023.10103805
DO - 10.1109/INERTIAL56358.2023.10103805
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AN - SCOPUS:85159056282
SN - 978-1-6654-5148-2
T3 - INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023
Y2 - 28 March 2023 through 31 March 2023
ER -