Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication

M. Sirota, B. Lipavsky, D. Nuttman, N. Melech, O. Halevy, S. Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on a novel Laser-Induced Chemical Etching technology for fabrication of functional crystalline quartz MEMS resonant sensors. The suggested lithography-free fabrication approach does not alter the crystalline structure of quartz and allows piezoelectric actuation and high geometric design flexibility. The resonant force sensitive device, incorporating compliant amplification mechanism, was fabricated by the reported method and its functionality has been demonstrated.

Original languageEnglish
Title of host publicationINERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781665451475
ISBN (Print)978-1-6654-5148-2
DOIs
StatePublished - 2023
Event10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023 - Lihue, United States
Duration: 28 Mar 202331 Mar 2023

Publication series

NameINERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
ISSN (Print)2377-3464
ISSN (Electronic)2377-3480

Conference

Conference10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023
Country/TerritoryUnited States
CityLihue
Period28/03/2331/03/23

Keywords

  • Crystalline quartz MEMS
  • force amplification
  • laser assistant etch
  • quartz anisotropic etch

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