Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

N. Moriya; Y. Shacham-Diamand; R. Kalish

doi:10.1063/1.103958

Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

N. Moriya^*
, Y. Shacham-Diamand
, R. Kalish

^*Corresponding author for this work

Technion-Israel Institute of Technology

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P⁺ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×10¹⁶ cm ^-2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊10¹⁵ cm^-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

Original language	English
Pages (from-to)	108-110
Number of pages	3
Journal	Applied Physics Letters
Volume	57
Issue number	2
DOIs	https://doi.org/10.1063/1.103958
State	Published - 1990
Externally published	Yes

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@article{84213bc98e6c4c51a82bf701333640fe,

title = "Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation",

abstract = "Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20\% (from 1.38 to 1.79) has been measured following 1.6{\texttimes}1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.",

author = "N. Moriya and Y. Shacham-Diamand and R. Kalish",

year = "1990",

doi = "10.1063/1.103958",

language = "אנגלית",

volume = "57",

pages = "108--110",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "2",

}

TY - JOUR

T1 - Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

AU - Moriya, N.

AU - Shacham-Diamand, Y.

AU - Kalish, R.

PY - 1990

Y1 - 1990

N2 - Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

AB - Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

UR - https://www.scopus.com/pages/publications/0000856705

U2 - 10.1063/1.103958

DO - 10.1063/1.103958

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:0000856705

SN - 0003-6951

VL - 57

SP - 108

EP - 110

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 2

ER -

Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

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