Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

N. Moriya; Y. Shacham-Diamand; R. Kalish

doi:10.1063/1.103958

Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

N. Moriya^*, Y. Shacham-Diamand, R. Kalish

^*Corresponding author for this work

Technion-Israel Institute of Technology

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P⁺ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×10¹⁶ cm ^-2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊10¹⁵ cm^-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

Original language	English
Pages (from-to)	108-110
Number of pages	3
Journal	Applied Physics Letters
Volume	57
Issue number	2
DOIs	https://doi.org/10.1063/1.103958
State	Published - 1990
Externally published	Yes

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abstract = "Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.",

author = "N. Moriya and Y. Shacham-Diamand and R. Kalish",

year = "1990",

doi = "10.1063/1.103958",

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N2 - Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

AB - Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

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Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

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