Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation

N. Moriya, Y. Shacham-Diamand, R. Kalish

Research output: Contribution to journalArticlepeer-review

Abstract

Drastic changes in index of refraction and volume shrinkage of spin-on-glass films induced by P+ implantation are reported. An increase in refraction index (n) as large as 20% (from 1.38 to 1.79) has been measured following 1.6×1016 cm -2 implantations. The changes in n are accompanied by a volume shrinkage of similar magnitude. However, at doses exceeding ≊1015 cm-2 the shrinkage saturates while the index of refraction continues to increase indicating that material changes other than simple densification must be responsible for the observed rise in refractive index.

Original languageEnglish
Pages (from-to)108-110
Number of pages3
JournalApplied Physics Letters
Volume57
Issue number2
DOIs
StatePublished - 1990
Externally publishedYes

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