Large angle parametrically excited tilting micro actuator

Assaf Ya'akobovitz, Slava Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present novel operational principle of a tilting MEMS device based on parametric excitation and linear to angular motion transformation. The device is fabricated using a single layer of silicon on insulator (SOl) wafer and combines simple fabrication process with several beneficial features including large tilting angles, wide bandwidth, low sensitivity to deviation in geometrical and operational parameters and low actuation voltage. A theoretical feasibility and performance study was carried out using a lumped model of the device and verified by a coupled three-dimensional simulation. Parametric excitation of the tilting motion was demonstrated experimentally using and external piezoelectric transducer and tilting angles of 390 were registered. The suggested operational approach could be efficiently implemented in many MEMS based applications incorporating tilting elements including rnicrornirrors, bio medical devices and inertial sensors.

Original languageEnglish
Title of host publication2008 Proceedings of the 9th Biennial Conference on Engineering Systems Design and Analysis
Pages289-293
Number of pages5
StatePublished - 2009
Event2008 9th Biennial Conference on Engineering Systems Design and Analysis - Haifa, Israel
Duration: 7 Jul 20089 Jul 2008

Publication series

Name2008 Proceedings of the 9th Biennial Conference on Engineering Systems Design and Analysis
Volume4

Conference

Conference2008 9th Biennial Conference on Engineering Systems Design and Analysis
Country/TerritoryIsrael
CityHaifa
Period7/07/089/07/08

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