IPEL - a novel ion-implanted electrically programmable element

Keyphrases

• Ion Implantation 100%
• Room Temperature 100%
• Order of Magnitude 50%
• Amorphous Silicon Thin Film 50%
• Amorphous Silicon 50%
• Resistivity 50%
• Aluminum Contact 50%
• Heavily Doped 50%
• Crystalline Silicon 50%
• Amorphization 50%
• Silicon Structure 50%
• Low Resistance State 50%
• Multicrystalline Silicon 50%
• Normal Contact 50%
• Specific Resistance 50%
• Energetic Ions 50%
• Irreversible Transformation 50%
• High-dose Ion Implantation 50%

Material Science

• Silicon 100%
• Amorphous Silicon 66%
• Crystalline Material 33%
• Ion Implantation 33%
• Aluminum 33%
• Electrical Resistivity 33%
• Single Crystal 33%
• Amorphization 33%