@inproceedings{46e83ff681d14b3ba7a2dcd5894735e5,
title = "Investigation of the early stages of contact metal nucleation by resistance measurements using four point probe technique",
author = "S. Haimson and Y. Shacham-Diamand and D. Horvitz and A. Rozenblat",
year = "2010",
language = "אנגלית",
isbn = "9781617822810",
series = "Advanced Metallization Conference (AMC)",
pages = "57--58",
booktitle = "Advanced Metallization Conference 2010",
note = "Advanced Metallization Conference 2010 ; Conference date: 05-10-2010 Through 07-10-2010",
}