Investigation of the early stages of contact metal nucleation by resistance measurements using four point probe technique

S. Haimson^*, Y. Shacham-Diamand, D. Horvitz, A. Rozenblat

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Advanced Metallization Conference 2010
Pages	57-58
Number of pages	2
State	Published - 2010
Event	Advanced Metallization Conference 2010 - Albany, NY, United States Duration: 5 Oct 2010 → 7 Oct 2010

Name	Advanced Metallization Conference (AMC)
ISSN (Print)	1540-1766

Conference	Advanced Metallization Conference 2010
Country/Territory	United States
City	Albany, NY
Period	5/10/10 → 7/10/10

Cite this

@inproceedings{46e83ff681d14b3ba7a2dcd5894735e5,

title = "Investigation of the early stages of contact metal nucleation by resistance measurements using four point probe technique",

author = "S. Haimson and Y. Shacham-Diamand and D. Horvitz and A. Rozenblat",

year = "2010",

language = "אנגלית",

isbn = "9781617822810",

series = "Advanced Metallization Conference (AMC)",

pages = "57--58",

booktitle = "Advanced Metallization Conference 2010",

note = "Advanced Metallization Conference 2010 ; Conference date: 05-10-2010 Through 07-10-2010",

}

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Investigation of the early stages of contact metal nucleation by resistance measurements using four point probe technique

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AU - Shacham-Diamand, Y.

AU - Horvitz, D.

AU - Rozenblat, A.

PY - 2010

Y1 - 2010

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AN - SCOPUS:79957650351

SN - 9781617822810

T3 - Advanced Metallization Conference (AMC)

SP - 57

EP - 58

BT - Advanced Metallization Conference 2010

T2 - Advanced Metallization Conference 2010

Y2 - 5 October 2010 through 7 October 2010

ER -