Investigation of the early stages of contact metal nucleation by resistance measurements using four point probe technique

S. Haimson, Y. Shacham-Diamand, D. Horvitz, A. Rozenblat

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationAdvanced Metallization Conference 2010
Pages57-58
Number of pages2
StatePublished - 2010
EventAdvanced Metallization Conference 2010 - Albany, NY, United States
Duration: 5 Oct 20107 Oct 2010

Publication series

NameAdvanced Metallization Conference (AMC)
ISSN (Print)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
Country/TerritoryUnited States
CityAlbany, NY
Period5/10/107/10/10

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