Interface engineering and direct bonding of lithium tantalate crystals

Ilya Torchinsky, Gil Rosenman

Research output: Contribution to journalArticlepeer-review

Abstract

A method for modifying the surface free energy of lithium tantalate (LT) ferroelectric crystals is reported. Ultraviolet illumination and low-energy electron irradiation have been used for tuning the surface free energy (wettability) resulting in a wide range of contact angles (6 deg to 87 deg). The ultraviolet (UV) illumination makes the LT crystal surface superhydrophilic while the low-energy electron irradiation decreases the surface wetting. Fabrication of various wetting configurations allows demonstration of high-quality direct bonding of LT plates with hydrophilic polar faces.

Original languageEnglish
Pages (from-to)1547-1551
Number of pages5
JournalJournal of Electronic Materials
Volume37
Issue number10
DOIs
StatePublished - Oct 2008

Keywords

  • Direct bonding
  • Ferroelectrics
  • LiTaO
  • Surface free energy

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