Integration of suspended carbon nanotubes into micro-fabricated devices

Keyphrases

• Carbon Nanotubes 100%
• Microfabrication 100%
• Silicon-based 100%
• Nanoelectromechanical Systems 100%
• Micro-fabricated 100%
• Chemical Vapor Deposition Growth 100%
• Suspended Carbon Nanotubes 100%
• Structural Features 50%
• Micromechanics 50%
• Fabrication Methods 50%
• Micro-nano 50%
• Multi-walled Carbon Nanotubes (MWCNTs) 50%
• Micron-scale 50%
• Electrical Contact 50%
• Conducting Electrode 50%
• Chemical Features 50%
• Tautness 50%
• Nanopore Sensing 50%
• Simple Fabrication 50%
• Commercial Utilisation 50%
• Electromechanical Transducer 50%

Engineering

• Carbon Nanotube 100%
• Chemical Vapor Deposition 40%
• Microelectromechanical System 40%
• Vapor Deposition 40%
• Microfabrication 40%
• Nanoscale 20%
• Fabrication Method 20%
• Electrical Contact 20%
• Electromechanical System 20%
• Electromechanical Transducer 20%